Turbo vacuum pumps, edwards, varian, pfeiffer, rentals high. The sd200 has a builtin oil sheild and forced air ventlation. Triscroll 600 series water pump pdf manual download. Rotary vane pumps ds102, ds202, ds302, ds402, ds602 user manual hs452 and hs652 rotary vane pump instruction manual ms301 and ms631 rotary vane pump user manual varian vs. Varian vacuum pumps, vacuum gauge controllers, leak.
A typical vacuum system, as illustrated in figure 1, consists of. Varian vacuum technologies instruction manuals ion products. Varian vacuum technologies instruction manuals turbo products. Discover vacuum pumps, helium leak detectors, vacuum measurement instruments, and vacuum components from agilent formerly varian vacuum. Operation of the varian turbo pumping station sd40 mechanical pump and turbov70 d mechanical pump considerations normal turbo pump operating procedure errors cryo rf vacuum.
Outer diameter is shown in table 1 for the different models. Get the best deals on varian other industrial pumps when you shop the largest online. Varian 350d revh rochester institute of technology. This varian 0184 diffusion pump was from a university surplus equipment sale. Turbo pumps pv250tk kit,tool and repair manual for. Major kit varian sd 200 major kit inlcudes gaskets, orings, seals, springs, valves, vanes, washers, etc. Read varian agilent idp3 dry oilfree scroll vacuum pump 165hrs. Agilent ds 302 varian ds302 ds 302 dual stage rotary vane.
Varian ds302 is a dual stage rotary vane pump with a pumping speed of 8. Varian service will only accept contaminated turbo or mechanical pumps. Tip seal replacement is generally is recommended when the pump base pressure has risen to an unacceptably high level for your application. Triscroll 600 dry scroll vacuum pump preface this manual provides the information you need to successfully perform tip seal replacement on your vacuum technologies triscroll dry vacuum pump. Crankshaft for varian agilent triscroll 300 dry scroll pumps, designed to be equal or better than the oem part in form, fit and function.
Oilless rotary vane pumps 23 series oilless rotary vane pumps covers 0323, 0523, 0823, 1023, and 1423 323334 series oilless rotary vane pumps covers 1531, 0532, 1032, 1532, 2032, 3032, 0533, 1033, 1034, and 1534 at03at05 oilless compressor pump sbsc series oil free vacuum pumps covers sc. Highvac specializes in total subfab vacuum and abatement support for largescale semiconductor end users. This ensures proper lubrication even when pressures are close to atmospheric. Pumps varian triscroll 300 series maintenance manual online. Varian will not be held responsible for any events that.
Varian offers more than 7,000 items, including vacuum pumps and leak detection products, components and accessories. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Used varian vacuum pumps for sale in california, usa machinio. It looks like the coil was extended an extra 8 inches to accommodate the position of the water baffle connection. The mr 15 is a helium mass spectrometer leak detector with fully automated tuning and calibration, a patented autozero feature, and a leak indicator display that shows leak rates automatically in a linear or log bar graph, and an audible alarm with dedicated volume control and programmable audio theshold. Vacuum technology, vacuum pumps, systems, helium leak. Dual stage rotary vane pumps user manual 8790093701 r 7168 safety precautions 89. The vacuum flange connection from the pump to the vacuum system is a conflat type flange. Vacuum pump repair kits adixen vacuum pump maintenance kits adixen i series vacuum pump maintenance kits boc edwards vacuum pump maintenance kits kits for leybold, precision, varian, and welch pump parts by manufacturer large selection. Agilent varian turbov 701 navigator turbomolecular vacuum pump rebuilt. Boron trifluoride phosphinehydrogen argon fomblin vacuum pump fluid. The varian tv 301, v301 9698918 navigator is an integrated system with a turbomolecular pump for high and ultrahigh vacuum applications with its relevant controller.
These pumps have silicon nitride, ceramic bearings. Technical documents and schematics vacuum pump replacement. Triscroll series vacuum pump declaration of conformity 9837eec, machinery directive en 10122. Agilent varian ds102 202 302 402 602 instruction manual.
Turbo pumps pv250tk kit,tool and repair manual for varian,v250. The pump comes sealed with a cover flange, a copper gasket and 6 stainless steel screwnut sets. Exc100e and exc100l turbomolecular pump controllers. Varian agilent idp3 dry oilfree scroll vacuum pump 165hrs. Varian tv 551 navigator turbo pump system with controller model 9698833, conflat 8 high vacuum inlet flange, kf25 inlet screen, 9699339 air cooling kit, 550 lps n2, ult.
Manuals for dry, wet, scroll, and boosters pumps polvac. The agilent ds 302 1ph is a dualstage, rotary vane pump oil sealed, driven by a singlephase electric motor. Precision pump temperature indicators diffusion pump accessories. Varian sd200 rotary vane vacuum pump varian pumps rotary.
Our range includes standard and fully customized turbo pumps, ion pumps, diffusion pumps, scroll pumps, rotary vane pumps, and helium leak detectors. Varian, ds42, dual stage rotary vane vacuum pump, instructions. Varian vs operation manual varian vs quick reference card varian vs wireless remote vari. Leybold, precision, varian, and welch vacuum pump maintenance. The agilent varian turbov macro torr pump is capable of operating at high foreline pressures because of the high speed to compression ratio. Vhs4 diffusion pump draft 8702 instructions for use this equipment is designed for use by professionals. The varian ds 302 vacuum pump works with forcefeed lubrication, provided by an auxiliary gear pump driven by the rotor of the vacuum pump itself. Read the agilent varian idp3 dry scroll vacuum pumps is a compact. In order to create vacuum in a system chamber, vacuum pumps or integrated pumping systems such as these are used.
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Agilent varian turbov 701 navigator turbo vacuum pump rebuilt. These high vacuum pumps are suitable for pumping non corrosive gases. All rebuilt pumps are sold with a one year warranty on parts and labor. Varian sd200 is a dual stage rotary vane pump with a pumping speed of 16 cfm and a ultimate total pressure of 2 x 103 mbar. Once sold, all mechanical vacuum pumps will be rebuilt to factory specifications, unless stated otherwise. All other products must be decontaminated by the customer before varian vacuum products lexington will assign a return authorization ra number and authorize the return of the product refer to the attached return authorization report on the next page. Pumps can be ordered fomblin or standard hydrocarbon oil prepped.
Connection to the vacuum system requires a new copper gasket. An attached label indicating varian 350d identifies them. Atm 104 torr variable leak bellows cf manual 28 atm 104 torr vacuum pump. Agilent varian vacuum pumps the agilent vacuum line is one of the broadest in the world, offering components and systems that cover a diverse range of applications. Varian triscroll 600 series manual pdf download manualslib. View and download varian triscroll 600 series manual online. We offer vacuum pump parts and repair for most models. Its a rotary vane mechanical vacuum pump with a 1 phase motor. The varian mr 15 helium leak detector is a mobile unit.
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